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EBSD Explained

EBSD Explained is a 24-page tutorial that not only gives newcomers a solid foundation in the underlining science of the subject but also shows how the theory is applied in practice to get reliable and accurate EBSD results.

Introduction
Electron Backscatter Diffraction (EBSD) is a scanning electron microscope (SEM) based technique that gives crystallographic information about the microstructure of a sample. In EBSD, a stationary electron beam interacts with a tilted crystalline sample and the diffracted electrons form a pattern that can be detected with a fluorescent screen. The diffraction pattern is characteristic of the crystal structure and orientation in the sample region where it was generated. Hence the diffraction pattern can be used to determine the crystal orientation, discriminate between crystallographically different phases, characterise grain boundaries, and provide information about the local crystalline perfection.

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