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Electron Backscatter Diffraction

Electron Backscatter Diffraction (EBSD)

Electron Backscatter Diffraction (EBSD) - analysis is a very powerful tool for microstructural characterisation.

Electron Backscatter Diffraction (EBSD) is a scanning electron microscope (SEM) based technique that gives crystallographic information about the microstructure of a sample. In EBSD, a stationary electron beam interacts with a tilted crystalline sample and the diffracted electrons form a pattern that can be detected with a fluorescent screen. The diffraction pattern is characteristic of the crystal structure and orientation in the sample region where it was generated. Hence the diffraction pattern can be used to determine the crystal orientation, discriminate between crystallographically different phases, characterise grain boundaries, and provide information about the local crystalline perfection.

EBSD has become a well-established accessory for the SEM, which is used to provide crystallographic information routinely. As a result, EBSD is now being applied in numerous different application areas to assist in materials characterisation, as shown by the table below.

The AZtec EBSD system combines the speed and sensitivity of the world's fastest and most sensitive EBSD detector, Symmetry S3, with the superior analytical performance of the AZtecHKL acquisition software and the AZtecCrystal to create a powerful and versatile tool for Electron Backscatter Diffraction (EBSD) and Transmission Kikuchi Diffraction (TKD) analysis.



Typical EBSD Measurements

Metals research and processingMetals, AlloysGrain size
AerospaceIntermetallicsGrain boundary characterisation
AutomotiveInclusions / precipitates / 2nd phasesGlobal texture
NuclearCeramicsLocal texture
MicroelectronicsThin FilmsCSL boundary characterisation
Earth ScienceSolar CellsRecrystallised / deformed fractions
AcademiaGeologicalSubstructure analysis
SemiconductorsPhase identification
SuperconductorsPhase fractions / distributions
IcePhase transformation
Metal / ceramic compositesFracture analysis
Bone, teethOrientation & misorientation relationships between grains / phases

Currently using EBSD and want to get the most out of your system? We offer multiple training courses all throughout the year.

Download Centre

EBSD Explained

EBSD Explained is a 24 page tutorial that not only gives newcomers a solid foundation in the underlining science of the subject, but also shows how the theory is applied in practice to get reliable and accurate EBSD results.

Symmetry S3

Symmetry S3 is a 3rd generation detector based on the advanced CMOS technology and unique design features that have made Symmetry the market’s leading EBSD detector.


This 16 page brochure illustrates why AZtec is the leading EBSD analysis platform on the market. Covers both hardware and software.

C+ Series EBSD Detectors

The C+ series EBSD detectors, the C-Nano+ and the C- Swift+, are 2nd generation entry-level detectors designed for every type of EBSD application.


Application Notes

High Sensitivity EBSD Detectors

CMOS-based EBSD detectors enable faster and more sensitive analyses of samples. Sensitivity is related to the full-system efficiency, or Detective Quantum Efficiency (DQE).

Why high sensitivity is essential for unlocking the power of CMOS-based EBSD detectors

CMOS-based EBSD detectors enable faster and more sensitive analyses of samples.


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EBSD Detectors

EBSD Software

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