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The preparation & analysis of 3D nanoparticles on an amorphous substrate using TKD

Conventional EBSD can be used to characterise nanoparticles that are distributed on a silicon wafer substrate but, although the electron backscatter patterns (EBSPs) may be visible for the nanoparticles, the signal is typically masked by that from the single crystal silicon substrate. This significantly inhibits the ability to acquire statistically relevant information on grain size, distribution and internal orientation.

In this application note, a new method of sample preparation and analysis using transmission Kikuchi diffraction (TKD) is introduced for the study and classification of nanoparticles. This technique will facilitate a faster and potentially more definitive analysis tool for the field of nanoparticle metrology.

By downloading this application note, you will learn:

  • An alternative sample preparation technique allows for the effective analysis of nanoparticles
  • The measurement of individual nanoparticles in TiO2 and ferrous oxide powders, with robust discrimination of phases via the TKD approach 
  • The TKD analyses have revealed indexed nanoparticles of different crystallography, chemical composition and form ranging in size from 10s to 100s nm
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