Wave Spectrometer

AZtecWave combines the unique power of WDS to resolve X-ray peaks and quantify minor and trace elements with the speed and flexibility of EDS. It uses the Wave WDS spectrometer which has the highest spectral resolution available for SEM to ensure more overlaps can be resolved and lower detection limits can be achieved. As the only EDS detector that gives the highest accuracy even at high count rates, Ultim Max combines with Wave to form the world’s highest performing microanalysis system.

Fully focussing Wave spectrometer with Rowland Circle geometry and curved crystals
Outstanding spectral resolution to fully resolve the most closely spaced X-ray lines
Higher peak to background ratios meaning detection limits lower than 100ppm
Motorised counter entrance slit optimises resolution and peak to background
Inclined geometry for fast, reproducible, and easy sample positioning

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AZtecWave uses the fully focussing Wave spectrometer with Rowland Circle geometry and curved crystals

Higher peak to background ratios meaning detection limits lower than 100ppm can be routinely achieved for many elements
Motorised counter entrance slit optimises resolution and peak to background for every X-ray line
Optimised for a wider range of energies using higher energy lines for more accurate quantitative results
Unique dual counters in series using Ar-CH4 for optimised light element and Xe for optimised high energy collection
Inclined geometry for fast, reproducible and easy sample positioning
Spectrometer miniview and mimic shows spectrometer position and setup at all times
Outstanding spectral resolution to fully resolve the most closely spaced X-ray lines meaning the most challenging problems are easily solved

- Spectral resolution
- SiKa <2eV
- FeKa <25eV

The highest SEM-WDS resolution available - for separation of closely spaced lines, such as S Kα = 2.307 keV and Mo Lα = 2.293 keV.

Rowland Circle Geometry

The Wave spectrometer uses a unique geometry for WDS on the SEM. For this geometry the sample, diffracting crystal and counter must be positioned on the Rowland Circle

The distance between sample and crystal and counter and crystal must be the same
Bent and ground crystals are used for best resolution
No requirement for fragile optic, slow mechanical alignment or transmission losses for higher energy lines
This unique geometry works at all energies and provides real WDS spectral resolution on the SEM

Optimised for all energies, meaning the optimum X-ray lines are always available for analysis
All common overlapping element lines separated including transition metal K lines
Lowest detection limits, in shorter collection times, with lower beam currents

WDS Hardware - Wave Spectrometer with W1 Clectronics
Geometry	Fully focussing Rowland circle
Quantification	Wave 500 - 0.17- 10.84 keV B (5) to PU (94) \| Wave 700 – 0.07 – 10.84 keV Be (4) to PU (94)
Spectral resolution	SiKα <2eV \| FeKα <25eV
Detection Limit	SiKα – 9ppm \| FeKα – 15ppm
X-ray Counters	P10 (Ar-CH<sub>4</sub>) Flow and Xe Sealed
Motorised gate valve to microscope	Standard

Video: Why AZtecWave?

High quality reference standards for standardizing WDS and EDS quantitative analysis

Available in 37 standard (42 elements), and 55 standard (56 element) blocks
All standards are supplied with certificate of analysis
Standard blocks include a Faraday cup for accurate measurement of beam current
All standard blocks are manufactured for Oxford Instruments by Micro-Analysis Consultants Ltd

Max+ interface optimises EDS when using very high beam currents

The Max+ interface has apertures of varying size used to reduce X-ray count rate into the EDS detector when working at very high beam currents

Optimum EDS performance always achieved so the analysis can be optimised for WDS detection
Large area EDS Ultim Max detectors with Max+ are compatible with all applications from low beam current EDS nano-analysis to combined EDS and WDS microanalysis
AZtec Wave always produces accurate answers

Detailed Applications for WDS

Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.

Discover detailed applications examples