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AZtecWave combines the unique power of WDS to resolve X-ray peaks and quantify minor and trace elements with the speed and flexibility of EDS. It uses the Wave WDS spectrometer which has the highest spectral resolution available for SEM to ensure more overlaps can be resolved and lower detection limits can be achieved. As the only EDS detector that gives the highest accuracy even at high count rates, Ultim Max combines with Wave to form the world’s highest performing microanalysis system.
Fully focussing Wave spectrometer with Rowland Circle geometry and curved crystals
Outstanding spectral resolution to fully resolve the most closely spaced X-ray lines
Higher peak to background ratios meaning detection limits lower than 100ppm
Motorised counter entrance slit optimises resolution and peak to background
Inclined geometry for fast, reproducible, and easy sample positioning
The highest SEM-WDS resolution available - for separation of closely spaced lines, such as S Kα = 2.307 keV and Mo Lα = 2.293 keV.
The Wave spectrometer uses a unique geometry for WDS on the SEM. For this geometry the sample, diffracting crystal and counter must be positioned on the Rowland Circle
| WDS Hardware - Wave Spectrometer with W1 Clectronics | |
| Geometry | Fully focussing Rowland circle |
| Quantification | Wave 500 - 0.17- 10.84 keV B (5) to PU (94) | Wave 700 – 0.07 – 10.84 keV Be (4) to PU (94) |
| Spectral resolution | SiKα <2eV | FeKα <25eV |
| Detection Limit | SiKα – 9ppm | FeKα – 15ppm |
| X-ray Counters | P10 (Ar-CH<sub>4</sub>) Flow and Xe Sealed |
| Motorised gate valve to microscope | Standard |
The Max+ interface has apertures of varying size used to reduce X-ray count rate into the EDS detector when working at very high beam currents
Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.
Discover detailed applications examples
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