Part of the Oxford Instruments Group


AZtecWave combines the unique power of WDS to resolve X-ray peaks and quantify minor and trace elements with the speed and flexibility of EDS. EDS and WDS Wave Spectrometer operation is fully integrated into the AZtec software, guaranteeing maximum accessibility to users with all levels of expertise and Tru-Q® processing technology for the most accurate results. When microanalysis is at its most challenging, AZtecWave provides accurate answers, fast.

  • Enhanced clarity of element identification and composition

  • Detection and measurement levels of trace elements down to tens of ppm

  • Accurate composition determination of all elements at all concentration levels

  • Fully integrated workflows designed to optimise combined EDS and WDS acquisition in the AZtec platform

  • Real-time input from EDS and SEM to optimises WDS set-up guaranteeing excellent results

Request Pricing Add to quote list


New levels of accuracy and sensitivity

  •  Enhance clarity of element identification and composition, where element peaks are not clearly resolved in the EDS spectrum
  • Detect and measure levels of trace elements down to tens of ppm
  • Determine accurate composition of all elements at all concentration levels
  • Measure major elements using EDS and heavily overlapped or trace elements by WDS
  • Solve characterisation challenges in metallurgy, electronics, mineralogy/geology, ceramics, forensics and nuclear power generation

Accessible to all users

  • Fully integrated workflows designed to optimise combined EDS and WDS acquisition in the AZtec platform
  • New technology uses real-time input from EDS and the SEM to optimise WDS set-up, and gives feedback to the user before the acquisition is started - guaranteeing excellent results in the shortest collection times, and for all levels of user expertise
  • Unique 3-way control to optimise beam current, count time and precision before quantitative analysis
  • Review and assess potential WDS scan quality with the selected settings before starting acquisition
  • Flexible, manual control for experienced users
  • The inbuilt technology uses EDS and SEM system information to inform automatic selection of:

For quantitative combined EDS-WDS analysis:

  • Count time
  • Line series and X-ray line
  • Diffracting crystal
  • Background positions
  • EDS acquisition parameters
  • EDS detector position

For qualitative WDS spectrum scanning:

  • Crystal(s)
  • Slit size(s)
  • Slit positions(s)
  • Dwell Time

Accurate for all elements

TiV scan 1000 dwell 0.2 slit size

The Wave WDS spectrometer allows AZtecWave to deliver true electron microprobe performance on a SEM

  • Optimised for all energies, meaning the optimum X-ray lines are always available for analysis
  • All common overlapping element lines separated including transition metal K lines
  • Lowest detection limits, in shorter collection times, with lower beam currents


Integrates seamlessly with the AZtecLive EDS software and technology

  • Tru-Q technology provides electron-microprobe level quantitative accuracy at EDS count rates up to 400,000cps
Quant results
Composition of a stainless steel determined by a combination of EDS and WDS in AZtecWave.
Co Fe overlap 4000 dwell 2 bin compare
WDS Scan of the Co Kα peaks present in a superalloy with 0.1 wt% Co.

Setup Spectrometer

Step by step workflow to guide you through Wave spectrometer setup and performance check

  • Designed for inexperienced users
  • Ensures safe operation
  • Provides rapid system set-up
  • Guarantees optimum performance

Generate performance test report where required (e.g. for accredited facilities)


Qualitative Spectrum Scanning

A sequence of steps for straightforward setup and acquisition of WDS spectrum scans using the Wave spectrometer

  • A scan range can simply be entered by using a swipe tool, or selecting a candidate element line
  • Based on the selected energy range, and using inbuilt technology, crystal, slit size, and slit position are automatically optimised
  • A theoretical scan is shown prior to acquisition, enabling settings to be assessed and adjusted before pressing start
  • Dwell times can be set between 0.005 and 50 s allowing major through to trace elements to be identified in scans
  • Both WDS scans and EDS spectra can be reviewed and compared

Quantitative Analysis

Dedicated workflow for combined EDS and WDS acquisition and quantitative analysis

  • Uses EDS for sample analysis location and to automatically optimise all EDS and WDS collection parameters
  • ‘Acquisition timeline’ estimates WDS acquisition time during acquisition set-up and shows status of the Wave spectrometer during acquisition
  • Advanced options include adding additional WDS acquisition or an existing EDS spectrum to an analysis
  • Dedicated ‘Calculation Composition’ step for viewing and checking quantitative results from single or multiple acquisitions
  • Synthesized WDS spectra transform EDS spectral data into high resolution, high peak to background space for checking overlaps, and acquisition energy for X-ray lines and backgrounds
Acquisition Timeline


Guided workflow to ensure system is optimally calibrated using standard materials for accurate composition determination

  • Optimised acquisition conditions calculated automatically
  • Oxford Instruments 42 and 56 element standard block composition and map are pre-loaded for easy navigation and speedy set-up
  • Association of beam current measurement with EDS count rate for calculation of un-normalised combined EDS-WDS results
Setup spectrometer
Qualitative spectrum scanning
Quantitative analysis
Image registration and navigation
Compare WDS scans and EDS spectra
Guided sample exchange and spectrometer shutdown
WDS spectrum simulation
WDS acquisition timeline
EDS informed automatic acquisition set-up
3 way control of beam current/acquisition time/precision
WDS X-ray Mapping INCA Energy+ (optional)

Detailed Applications for WDS 

Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.

Discover detailed applications examples


Introduction to Wavelength Dispersive Spectrometry

This tutorial explains the principles of Wavelength Dispersive Spectrometry (WDS / WDX) and how a WD spectrometer with Rowland Circle geometry works on an SEM in combination with EDS.

Watch this video & learn:
✅ The principles of Wavelength Dispersive Spectrometry
✅ How the Oxford Instruments Wave spectrometer works and how it enhances a SEM-EDS system
✅ When you might want to conduct WDS analysis and typical applications

Enhanced Compositional Mapping on the SEM Through Combined EDS-WDS Mapping in AZtecWave

This video presents how elemental mapping using a fully focussing Rowland circle, wavelength dispersive spectrometer (WDS / WDX) can enhance compositional mapping with Energy Dispersive Spectrometry (EDS / EDX), by enabling accurate mapping of elements present in trace concentrations or impacted by X-ray peak overlaps in the EDS spectrum

This is illustrated with a WDS-EDS dataset collected from a steel sample containing multiphase inclusions, which was acquired using functionality that is coming soon to the AZtecWave software for combined WDS and EDS mapping.

Resolve Overlaps & identify trace elements using WDS Scan in AZtecWave

WDS Scan is a new workflow in AZtecWave that enables the positive identification of elements affected by peak overlaps in the EDS spectrum, and/or present in trace concentrations (Less than 0.1 wt%).

Several different sample types will be presented as examples, including minerals, metals, and solder used in electronics. In addition, the tutorial will include demonstrations of how to; (1) acquire WDS scans using the different setup tools available, (2) identify the element lines present, and (3) compare multiple WDS scans and EDS spectra.

AZtecWave - extend the capability of your SEM

Discover how AZtecWave is the perfect solution to accurately and quickly detect all elements for challenging issues in the SEM. Discover how AZtecWave can help you achieve high quality results. 


AZtecWave - WDS Scan

Discover the latest functionality for the AZtecWave WDS Scan, which powers the only WDS spectrometer with true electron-microprobe resolution and performance on the SEM. See how you can take data from SEM-EDS to a new level of certainty - by showing all peak overlaps fully resolved and accurately measuring all elements, including those present at the minor or trace level.


Resolving X-ray line overlaps using WDS & AZtecWave

Both EDS and WDS are techniques that use X-rays, generated when an electron beam interacts with a material, to determine the elemental composition. Since EDS can collect all X-ray energies at the same time, compared to WDS which collects one X-ray energy (i.e., element-line) at a time, EDS is faster and therefore more commonly used for SEM-based compositional analysis. However, WDS does bring some significant advantages over EDS.

A Practical Introduction to Wavelength Dispersive Spectrometry (WDS) and AZtecWave

This tutorial will give a practical introduction to WDS and AZtecWave - our new software for combined SEM-based EDS-WDS analysis.

AZtecWave: WDS detection and EDS speed with AZtec accuracy and accessibility

AztecWave accelerates your time to results, helping you achieve more in less time, with unparalleled accuracy and certainty. In this tutorial, discover how AZtecWave provides WDS detection and EDS speed with accuracy and accessibility. 

You may also be interested in...

Related Applications

Structural Materials and ComponentsBattery TechnologyMaterials for the Power Generation IndustryForensic Soil Analysis and Other Trace AnalysisMaterial Composition and StructureFabrication and Characterisation of Light Emitting DevicesRock Core Analysis

Upcoming events