Part of the Oxford Instruments Group


AZtecWave combines the unique power of WDS to resolve X-ray peaks and quantify minor and trace elements with the speed and flexibility of EDS. EDS and WDS Wave Spectrometer operation is fully integrated into the AZtec software, guaranteeing maximum accessibility to users with all levels of expertise and Tru-Q® processing technology for the most accurate results. When microanalysis is at its most challenging, AZtecWave provides accurate answers, fast.

  • Enhanced clarity of element identification and composition

  • Detection and measurement levels of trace elements down to tens of ppm

  • Accurate composition determination of all elements at all concentration levels

  • Fully integrated workflows designed to optimise combined EDS and WDS acquisition in the AZtec platform

  • Real-time input from EDS and SEM to optimises WDS set-up guaranteeing excellent results

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New levels of accuracy and sensitivity

  •  Enhance clarity of element identification and composition, where element peaks are not clearly resolved in the EDS spectrum
  • Detect and measure levels of trace elements down to tens of ppm
  • Determine accurate composition of all elements at all concentration levels
  • Measure major elements using EDS and heavily overlapped or trace elements by WDS
  • Solve characterisation challenges in metallurgy, electronics, mineralogy/geology, ceramics, forensics and nuclear power generation

Accessible to all users

  • Fully integrated workflows designed to optimise combined EDS and WDS acquisition in the AZtec platform
  • New technology uses real-time input from EDS and SEM to optimise WDS set-up guaranteeing excellent results in the shortest collection time for all levels of user expertise
  • Unique 3-way control to optimise beam current, count time and precision before acquisition
  • Manual control for experienced users
  • EDS and SEM inform automatic selection of:
        • Count time
        • Line series and X-ray line
        • Diffracting crystal
        • Background positions
        • EDS acquisition parameters
        • EDS detector position

Accurate for all elements


The Wave WDS spectrometer allows AZtecWave to deliver true electron microprobe performance on a SEM

  • Optimised for all energies, meaning the optimum X-ray lines are always available for analysis
  • All common overlapping element lines separated including transition metal K lines
  • Lowest detection limits, in shorter collection times, with lower beam currents

Integrates seamlessly with the AZtecLive EDS software and technology

  • Tru-Q technology provides electron-microprobe level quantitative accuracy at EDS count rates up to 400,000cps

Setup Spectrometer

Step by step workflow to guide you through Wave spectrometer setup and performance check

  • Designed for inexperienced users
  • Ensures safe operation
  • Provides rapid system set-up
  • Guarantees optimum performance

Generate performance test report where required (e.g. for accredited facilities)

Quantitative Analysis

Dedicated workflow for combined EDS and WDS acquisition and quantitative analysis

  • Uses EDS for sample analysis location and to automatically optimise all EDS and WDS collection parameters
  • ‘Acquisition timeline’ estimates WDS acquisition time during acquisition set-up and shows status of the Wave spectrometer during acquisition
  • Advanced options include adding additional WDS acquisition or an existing EDS spectrum to an analysis
  • Dedicated ‘Calculation Composition’ step for viewing and checking quantitative results from single or multiple acquisitions
  • Synthesized WDS spectra transform EDS spectral data into high resolution, high peak to background space for checking overlaps, and acquisition energy for X-ray lines and backgrounds
Acquisition Timeline


Guided workflow to ensure system is optimally calibrated using standard materials for accurate composition determination

  • Optimised acquisition conditions calculated automatically
  • Oxford Instruments 42 and 56 element standard block composition and map are pre-loaded for easy navigation and speedy set-up
  • Association of beam current measurement with EDS count rate for calculation of un-normalised combined EDS-WDS results
Setup spectrometer
Quantitative analysis
Image registration and navigation
Guided sample exchange and spectrometer shutdown
WDS spectrum simulation
WDS acquisition timeline
EDS informed automatic acquisition set-up
3 way control of beam current/acquisition time/precision
Qualitative spectrum scanning INCA Wave
WDS X-ray Mapping INCA Energy+ (optional)

INCAWave complements AZtecWave by offering:

  • Qualitative spectral scanning using WDS 
  • Excellent peak separation of all X-ray lines


INCAEnergy+ provides simultaneous WDS and EDS acquisition for X-ray mapping:

  • Accurate X-ray mapping of minor elements and overlapping X-ray peaks
  • Unattended data collection of WDS and EDS using stage automation with INCA AutoMate+

Detailed Applications for WDS 

Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.

Discover detailed applications examples

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