AZtecWave

AZtecWave includes functionality for:

Quantitative X-Ray Analysis

• Perform fully integrated WDS and EDS quantitative analysis in a dedicated navigator with a dedicated workflow
• Smart software technology uses EDS and SEM system information to automatically select / optimise:
  • Peak and background counting times
  • X-ray lines (WDS) and line series (EDS)
  • Diffracting crystal(s)
  • WDS background position
  • EDS detector position
  • EDS acquisition settings

• An acquisition timeline reliably estimates the WDS analysis time and shows the status of the Wave spectrometer as the analysis proceeds
• Flexible options allow additional WDS acquisitions or EDS spectra to be added to an existing analysis point
• Includes a dedicated step for viewing combined WDS – EDS quantitative data for single or multiple acquisitions

Qualitative Spectrum Scanning

• A dedicated workflow for acquiring high spectral resolution WDS scans – providing positive visual identification of the elements present in a sample 
• The scan range for can be easily entered using the spectrum swipe tool, or element X-ray line(s) of interest can be chosen
• Based on the selected energy range, AZtecWave technology automatically selects the optimal crystal(s), slit size(s), slit position(s) and dwell time for the WDS scan
• A theoretical WDS scan is shown prior to acquisition, enabling settings to be assessed and adjusted before pressing start
• Dwell times can be set between 0.005 and 50 seconds allowing major through to trace elements to be identified in scans
• Multiple WDS scans and EDS spectra can be reviewed and compared in a dedicated window

Figure showing WDS scan positively identifying the presence of Co in a superalloy containing ~0.1 wt% Co, which is not apparent in the EDS spectrum

X-ray Mapping

WDS element maps acquired from a babbitt alloy overlaid on a secondary electron image

• A guided workflow for collecting elemental X-ray maps using a combination of WDS and EDS
• One or more elements can be mapped using WDS and simultaneously acquired / combined with element maps collected using EDS
• The optimal WDS diffracting crystal(s) and X-ray line(s) are automatically selected for the acquisition
• Multiple frame mapping can be conducted with pixel dwell times ranging between 100 and 65,000 µs - for effective mapping of major through to trace elements
• WDS and EDS elemental maps can be overlain with associated electron images
• Includes a flexible option to add additional X-ray map(s) to an existing map set

Point Automation of WDS and EDS Acquisition (optional extra)

• Allows WDS and EDS data to be automatically acquired from pre-defined points (stage positions) on a sample(s)
• Automated analysis can be conducted on:
  • Individual stage positions
  • Lines of points – defined by start and end stage positions, with either a set number of points or spacing 

• Results are displayed in a table that updates as the points are acquired and the data can be interrogated during and after acquisition
• Options exist to define how often to remeasure the beam current and WDS backgrounds – to ensure optimum data quality and save time
• Enables time-efficient instrument use, with the ability to run analyses whilst away from the SEM

WDS Standardisation

• Guided workflow for calibrating on standard reference materials to ensure accurate quantitative elemental analysis 
• AZtecWave software technology automatically selects the optimal X-ray line, WDS crystal, peak and background counting times to achieve a defined level of precision with the chosen beam current
• Details of blocks* containing 37 and 55 standard reference materials are pre-loaded for simple setup and analysis
• Association of beam current measurement with EDS count rate for calculation of un-normalised combined EDS-WDS results

Guided Spectrometer Setup

• Step by step workflow for Wave spectrometer setup and performance check
• Designed for inexperienced operators
• Ensures safe operation and enables rapid system setup
• Guarantees optimal spectrometer performance
• A performance test report can be generated if required (e.g. for accredited facilities)
• Includes SEM beam stability monitoring for checking the beam is stable before proceeding with quantitative analysis

Image Registration

• Images, maps, and schematics of samples and standard blocks can be loaded into AZtec and registered to stage positions
• Stage navigation can then simply be conducted by clicking on the registered image – making sample and standard block navigation quick and easy
• Multiple images can be registered (e.g., for different samples)
• Oxford Instruments 37 and 55 standard block schematics are pre-loaded, making image registration and standard block navigation even more straightforward

WDS Spectrum Simulation

• Synthesised WDS spectrum is generated by the unique software technology that transforms EDS spectral data into high resolution, high peak to background space
• This enables AZtecWave to automatically check for overlaps and determine the optimal X-ray lines and background positions for the WDS analysis

Detailed Applications for WDS 

Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.