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Electron Beam Induced Current (EBIC)

Electron Beam Induced Current is a well-established analysis method of electrical activity in the SEM (and occasionally in the STEM). It provides a unique correlation of electrical and structural properties with very high spatial resolution. Typical applications include the identification of electrical defects in semiconductor devices (such as grain boundaries or single dislocations), as well as the measurement of non-radiative recombination activity and diffusion length of minority charge carriers.

By downloading this application note you will see:

  • How Oxford Instruments provides an integrated EBIC hardware and software system with nanoprobes for electrical probing and automated quantitative signal acquisition.
  • A number of nanoprobing configurations with port-mounted nanomanipulators are introduced and explained.
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