Part of the Oxford Instruments Group
As part of our studies into challenges of how to quantify nano-structures, we are starting to consider in greater depth the potential capability of a different method that allows us to use high-kV for quantitative analysis on nano-structures. This is done by analysing a thin lamella rather than a bulk sample, so called SEM-STEM or 30kV STEM. It’s a somewhat mis-leading term, as a STEM detector is not a requirement, but it takes advantage of the much smaller volume of interaction when an electron beam interacts with a thin sample / lamella at high kV.
By downloading this application note, you will how:
