Part of the Oxford Instruments Group

Analysing a NAND Flash memory device using low kV EDS

Historically energy dispersive X-ray spectroscopy has been focused towards high energies where X-ray lines are well separated and the X-ray background is low. Recently the demand for higher spatial resolution, whether that is when analysing semiconductor devices or measuring precipitates in metals, has increased dramatically. To ensure maximum sensitivity when working under these demanding conditions the Ultim® range of EDS detectors combines the largest area SDD with optimised geometries to consistently deliver a higher count rate. 

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