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EDS for SEM and FIB

Oxford Instruments provides AZtec analysis software and a wide choice of SDD detectors for EDS analysis in the SEM or FIB.

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AZtecLive & Ultim Max

AZtecLive takes the EDS technique from the static to the dynamic with real-time chemical imaging. AZtecLive is powered by the next generation SDD detectors Ultim Max.

SDD Explained

This guide describes how SDD hardware detects and measures the X-rays and converts them into signals which can be used by EDS software to provide accurate and reliable analysis.


AZtecFeature is an innovative system for particle analysis in the SEM. It is specifically optimised for usability and high-speed throughput. This 12 page brochure gives an overview of the system.

Ultim Extreme

The Ultim Extreme is a windowless 100 mm2 version of X-Max designed to maximise sensitivity and spatial resolution. It uses a radical geometry to optimise both imaging and EDS performance in ultra-high resolution FEG-SEMs.


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