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Energy Dispersive Spectroscopy (EDS)

EDS Analysis provides elemental and chemical analysis of a sample inside the SEM, TEM or FIB. Oxford Instruments provides AZtec, a new and revolutionary materials characterisation system that gathers accurate data at the micro- and nanoscales.

Currently using EDS and want to get the most out of your system? We offer multiple training courses all throughout the year.

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SDD Explained

This guide describes how SDD hardware detects and measures the X-rays and converts them into signals which can be used by EDS software to provide accurate and reliable analysis.

EDS in the TEM Explained

This 12 page document gives an introduction to EDS applications in the Transmission Electron Microscope (TEM). It covers the theory of the SDD operation and X-ray analysis.

AZtecLive & Ultim Max

AZtecLive takes the EDS technique from the static to the dynamic with real-time chemical imaging. AZtecLive is powered by Ultim Max, the next generation SDD detectors combining the largest sensor sizes with Extreme electronics to deliver unparalleled speed and sensitivity.

Ultim Max TEM

Ultim Max is the next generation of Silicon Drift Detectors (SDD) utilising our Extreme electronics to generate maximised sensitivity with increased throughput. This powers AZtecTEM, the market-leading software that delivers unparalleled elemental characterisation performance in the TEM.


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EDS for SEM and FIB >

EDS for TEM >

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