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EDS
Energy Dispersive Spectroscopy

Energy Dispersive Spectroscopy (EDS) Analysis provides elemental and chemical analysis of a sample inside the SEM, TEM or FIB. Oxford Instruments provides AZtec, a new and revolutionary materials characterisation system that gathers accurate data at the micro- and nanoscales.

 

Currently using EDS and want to get the most out of your system? We offer multiple training courses all throughout the year.

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SDD Explained

This guide describes how SDD hardware detects and measures the X-rays and converts them into signals which can be used by EDS software to provide accurate and reliable analysis.

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EDS in the TEM Explained

This 12 page document gives an introduction to EDS applications in the Transmission Electron Microscope (TEM). It covers the theory of the SDD operation and X-ray analysis.

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AZtecLive & Ultim Max

AZtecLive takes the EDS technique from the static to the dynamic with real-time chemical imaging. AZtecLive is powered by Ultim Max, the next generation SDD detectors combining the largest sensor sizes with Extreme electronics to deliver unparalleled speed and sensitivity.

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EDS for SEM and FIB


EDS for TEM

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