Part of the Oxford Instruments Group
Expand
EDS
Energy Dispersive Spectroscopy

Energy Dispersive Spectroscopy (EDS) Analysis provides elemental and chemical analysis of a sample inside the SEM, TEM or FIB. Oxford Instruments provides AZtec, a new and revolutionary materials characterisation system that  gathers accurate data at the micro- and nanoscales.

EDS for SEM and FIB


EDS for TEM

Got a question?