Part of the Oxford Instruments Group


AZtec® integrates AZtecEnergy acquisition and EDS analysis software with the X-MaxN and x-act SDD detectors to create the ultimate materials characterisation system.

  • AZtec combines unrivalled speed and accuracy of results for routine analysis, with the flexibility and power required for applications that push the frontiers of the EDS technique.
  • Developed by the market leader with global customer support and over 40 years experience in nanoanalysis, AZtec meets the ever more challenging requirements of EDS analysis at the nanoscale.

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AZtec integrates AZtecEnergy acquisition and EDS analysis software with the X-MaxN and x-act SDD detectors to create the ultimate materials characterisation system.


  • AZtec has a host of new tools and technologies that will transform the way you get results and enable everyone to see ‘The Real Picture’


  • Whatever your level of expertise, AZtec will be there to guide you from start to finish or give you the tools to explore in your own way


  • Every feature of AZtec has been optimised with speed and productivity in mind, for consistently accurate real-time results


  • New Tru-QTM technology takes standardless analysis to the next level and ensures that AZtec gives you the best ‘out of the box’ results


  • A host of brand new features and novel visualisations deliver useful information to help you make decisions


  • Whatever your level of expertise, AZtec will assist you from start to finish with Step Notes and editable Standard Operating Procedures (SOP)

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AZtecEnergy EDS Microanalysis software characterises material composition of samples inside a SEM or FIB. This 20 page brochure shows why AZtecEnergy is the world's leading EDS solution.


From 20 mm2 to a combined working area of 600 mm2, the X-MaxN range of Silicon Drift Detectors provides a powerful solution for EDS analysis in the SEM. This 12 page brochure shows why.

X-Max Extreme

The X-Max Extreme is a windowless 100 mm2 version of X-Max designed to maximise sensitivity and spatial resolution. It uses a radical geometry to optimise both imaging and EDS performance in ultra-high resolution FEG-SEMs. The 4 page brochure shows some of the applications.


AZtecEnergy Videos

Point&ID has been designed to take advantage of the high count rates generated by the latest SDD detectors to deliver accurate specimen information in real-time. Simply select the area to analyse, then, in a the few seconds required to acquire a spectrum:

  • Elements are identified using an improved version of our field-proven automatic PeakID routine
  • Composition is displayed in the unique MiniQuant using the accuracy of new Tru-Q technology
  • Annotate and e-mail results directly from the software

Tru-Q Analysis Engine

New Tru-Q technology takes standardless analysis to the next level and ensures that AZtec gives you the best ‘out of the box’ results

  • QCAL – Robust spectrum processing that works in all situations with no need for any background fitting adjustment
  • FLS – Complete detector and hardware characterisation for true standardless analysis
  • XPP – Matrix correction with proven accuracy beyond that possible with ZAF or Phi-Rho-Z
  • PPC - Automatic correction for pulse pile-up at high count rate, making accurate quant at 200,000cps a reality

Visualise element distribution along a line.

LineScan brings the concepts of AZtec real-time acquisition and reporting to the study of linear variations

  • Visualise LineScans clearly, quickly and easily
  • Flexible views make interpretation easy
  • View LineScans in stacked or tilted format
  • Normalise display to compare major and trace element variations easily

Incorporates TruMap technology ensuring that you will see real element distribution

  • Corrects for peak overlaps automatically
  • Enhances real elemental differences by removing X-ray background variation
  • Aligns image and LineScan for clear visual comparison
  • Normalised intensity scales make comparison of major and minor elements simple

Utilise the accuracy and repeatability of Tru-Q to see quantitative element variations

  • No need to wait for lengthy data processing....see quantitative linescans live!
  • Quantitative results shown in Wt% or At%
  • Table of results can be exported to Excel


  • Point spectra can be extracted from any of the linescans for further, more detailed, analysis
  • Data can be viewed in graphic form or as a table
  • Linescans can be binned to improve statistics

Combining and overlaying EDS Element maps on an electron image to make one informative coloured image is fast becoming a common way to view the distribution of elements in a specimen. But it’s important to know that the data behind this good looking image is correct...

SmartMap spectral mapping brings the benefits of automatic qualitative analysis into two dimensions to identify elements and show their distributions. Now see how all elements are distributed in a specimen

  • No specimen pre-knowledge required
  • Maps for all elements identified and generated automatically
  • Single Layered Image highlights chemistry and phase distribution in seconds
  • Up to 4K SmartMap resolution to combine wide area and high resolution studies

AutoLayer - a complex story made simple.
At the click of a button, AutoLayer takes the often complex information contained in a set of X-ray maps, and turns it into a single image that helps you visualise both phase and element distribution in your specimen.

  • Instantly and automatically interprets your specimen
  • Highlights what’s important in a single image
  • Unravels the complexity of real specimens
  • Colours on the Layered Image correlate to the X-ray map colours


TruMap is a unique real-time mapping solution that takes advantage of the increased counts generated by the latest SDD detectors, offering a new level of data you can see the real element variation.

  • Eliminates artifacts
  • Corrects element overlaps
  • Removes false variations due to X-ray background
  • Everything operates in real-time

Specimen characterisation can often be time consuming and requires a highly skilled operator to interrogate the data. At a touch of a button, AutoPhaseMap automatically finds areas of different characteristic composition from X-ray map data, and determines the distribution, area, constituent elements and generates an easy to interpret Phase Image.

AutoPhaseMap is a new way of automatically creating a phase distribution map of a specimen.

During or after acquisition, AutoPhaseMap automatically:

  • Turns X-ray map data into Phase Map data in seconds
  • Calculates and displays:
    • distribution of each phase
    • spectrum and composition for each phase
    • area fraction for each phase
  • Finds phases for all size ranges, including nanomaterials
  • Finds hidden phases, highlighting missing elements which are present in trace amounts

Making Large Area automated data collection an every day occurrence

  • An easy to use wizard guides users through the setup process and ensures that even the most infrequent user can acquire a Large Area Map
  • Accommodates tilted specimens to ensure that images are always in focus
  • Images are automatically aligned during acquisition to ensure a seamless LAM dataset both before and after montaging
  • Acquire up to 1500 fields, each with a maximum resolution of 8K x 8K, and X-ray maps with a maximum resolution of 4K x 4K, to create an image dataset of up to 96 billion pixels and an X-ray dataset of up to 24 billion pixels
  • LAM is fully interactive during acquisition: enabling users to view all the data combined, and also zoom into the fine detail
  • An individual field can be interrogated and X-ray map properties modified. Changes can then be applied to all fields in the LAM ...even during acquisition!
  • Automatic system pause when a blown filament is detected - once the filament is replaced, acquisition can be resumed

LAM montages all the acquired data into a single SmartMap dataset with up to 64 million data points.

Exploiting the power of 64-bit processing, users can interrogate the montaged data in the same way as a standard SmartMap dataset, and:

  • Add/remove maps
  • Reconstruct deadtime corrected spectra from the SmartMap data and obtain accurate quant results
  • Create TruMaps and AutoPhaseMaps

Whether you are a newcomer or an expert user, setting up for a stable, drift-free acquisition, to re-locating points of interest in a previously analysed sample - to getting your report out to those waiting for it is made as quick and as easy as possible...

Some of the advanced AZtec features in this section:

  • Autolock - automatic drift correction
  • Image registration using AZtec acquired images for specimen navigation and relocation
  • Guided and custom operating modes
  • Step notes and Standard Operating Procedures
  • Reporting

Autolock provides a seamlessly integrated and powerful solution for drift correction.

  • Works in extreme situations, even on the nanoscale
  • Keeps you informed about specimen drift
  • Provides live updates of corrective action taken
  • Unique blend of predictive and reactive drift correction routines cope with different types of specimen drift

Image Registration

All AZtec acquired images can be used for specimen navigation and relocation
AZtec takes control of the microscope stage and seamlessly relocates to points of interest
During a session, any acquired image or map is automatically registered, enabling easy relocation to previously analysed areas
Any image can be used for navigation i.e. an X-ray map can be used to navigate to an area rich in a particular element
Manually registering images enables specific areas of a specimen to be further investigated at a later date, even on another microscope

Guided and Custom operation modes to suit newcomers and experts

Guided Mode
Ideal for those who prefer a ‘step by step’ approach to analysis
Each step of the Navigator has a clear purpose
You can always see what is happening and what to do next

Custom Mode
Ideal for those who prefer the freedom and flexibility to do what they want, when they want
You decide what functionality you want to see and where you want to see it
Choose the visualisations that suit your task and expand them over as many monitors as you need

Step Notes are available on every Navigator step to help you get the most from AZtec in the quickest time possible

Help precisely where you need it
Easy to follow text and images ensure that you know exactly what to do next
Step Notes can be easily turned into Standard Operating Procedures (SOPs)
Define on-screen SOPs using text and images
By following an SOP, novice staff can be productive from the start, and achieve repeatable and reliable results every time

Integrated Reporting - flexible or structured, always fast

Reporting direct from the interface
A simple right click and data can be e-mailed direct to your customer

Dedicated export application
Export your data in the format and resolution you want

Print a professional report with a single button press
Comprehensive list of report templates tailored to each application
A dedicated ‘Site Report’ will print out all data acquired during a specimen investigation
Customise reports to incorporate your company logo

Want to create your own templates? AZtec’s new integrated report template generator allows you to do just that!

  • Simple easy to use interface
  • Create templates for use across multiple techniques
  • Create multiple page templates
  • Create templates for single or multiple users

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