The only way to achieve EPMA performance on a SEM.
The INCA WAVE WDS spectrometer is the only WDS spectrometer available for SEM that uses the same fully focussing geometry as used in EPMA. This means 2x better resolution and more stable and reproducible measurements.
WAVE is a fully focussing spectrometer renowned for its engineering precision and quality. The internal components of the spectrometer (crystal, detectors and goniometer) function in complete harmony and with ultra-high precision so that the correct diffraction conditions are maintained - and measurements are reproducible.